Edwards STP-L451 Series - Operation Principle

STP Series Turbomolecular Pump
MT-00E-001-M
Page 8
INTRODUCTION
1
1.7 Operation principle of the STP pump
The STP series pump is a series of a magnetically-levitated turbomolecular pumps, each with the
following features:
• Oil free
• Low vibration
• High reliability
7
6
5
4
2
1
3
1.
Rotor blade
5.
Axial sensor
2.
Stator blade
6.
Axial electromagnet
3.
Radial sensor
7.
Touch down bearing
4.
Radial electromagnet
Figure 8 - Cross sectional view of the STP pump