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Edwards STP-XF813 Series User Manual

Edwards STP-XF813 Series
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STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 28
INSTALLATION
3
3.3.2 Name and function of the control unit
Figure 16 shows the front panel of the control unit.
WARNING
A hazardous live voltage may exist at the connectors that are marked with the
warning sign . DO NOT touch the connecter. Doing so may result in electric
shock. When connecting/disconnecting the connecter, always power off the primary
power (switch the MAIN POWER to "OFF") and isolate (Lockout/Tagout) the
electrical energy source, water and gas, and other energy sources on the vacuum
equipment.
1 "POWER" LED 7 "AC POWER" connector (X1)
2 "FAILURE" LED 8 "COM2" connector (X4)
3 "ROTATION" LED 9 "Data" LED
4 "COM1" connector (X3) 10 "Off-Line" LED
5 "STP-LINK" connector (X5) 11 "Error" LED
6 "MAIN POWER" switch 12 "REMOTE" connector (X2)
Figure 16 - Control unit (Front panel)
Note: Refer to Table 4, Table 5 for front panel functions.
4
6 7
1
0
1
11
5
12
8
9
3
2

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Edwards STP-XF813 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-XF813 Series
CategoryWater Pump
LanguageEnglish

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