Edwards STP-XF813 Series

STP Series Turbomolecular Pump
MT-00E-1C1-D
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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 Electromagnetic compatibility 2
1.3 Limited warranty 2
1.3.1 Item warranted 2
1.3.2 Disclaimer 3
1.3.3 Spare parts 3
1.4 Precautions for safe operation of the STP pump 4
1.4.1 Usable gases 4
1.5 Maintenance and inspection precautions 5
1.6 Labels 5
1.7 Operation principle of the STP pump 9
1.8 Temperature management system 10
1.9 Name of the STP pump 11
2 INSTALLATION OF THE STP PUMP 13
2.1 Precautions before installation 13
2.1.1 Operating environment 13
2.1.2 Installation area 15
2.1.3 Bench 16
2.2 Unpacking 17
2.2.1 Unpacking the STP pump 17
2.3 How to install the STP pump 20
2.3.1 Cleaning the seal 22
2.3.2 STP pump installation positions 23
2.3.3 Secure the STP pump 24
2.3.4 Precautions of vacuum piping 24
2.3.5 Vacuum piping method 25
2.3.6 Connecting the purge port 26
2.3.7 Connecting the water cooling pipe 26
2.3.8 Attaching a baking heater 27
2.3.9 Installation of the air cooling unit 27
2.3.10 Installation of the TMS unit 27
3 INSTALLATION OF THE STP CONTROL UNIT 29
3.1 STP control unit 29
3.1.1 SCU-350 series 29
3.1.2 SCU-800/801 30
3.1.3 SCU-1600/1601 31
3.2 Cable connection 32
3.2.1 STP connection cable 32
3.2.2 Power cable 33
3.3 How to connect the cables 34