Edwards STP-XF813 Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page vi
PAGE
vi
ILLUSTRATIONS
Figure Title Page
1 STP pump installation warning label 6
2 Hot surface warning label 6
3 Heavy product caution label 7
4 High voltage device caution label 7
5 Rotation instruction label 8
6 Cross sectional view of the STP pump 8
7 External appearance of STP-iXR1606 16
8 Label affixing positions 17
9 Space around the STP pump 21
10 Example of lifting the STP pump 23
11 Example of lifting the STP pump (horizontal positioning) 24
12 Jack-up the STP pump 25
13 Control unit bottom face 25
14 STP pump with eyebolts 26
15 Configuration of the STP pump 27
16 Control unit (Front panel) 28
17 Installation of the STP pump to the vacuum equipment 31
18 STP pump installation positions 33
19 Positions of the outlet port on the horizontally
or slanted installed STP pump 33
20 Bolt position for securing the flange 37
21 Methods of securing the STP pump 37
22 Screw holes for securing the base 38
23 Power cable 39
24 Connecting method of the power cable 40
25 Height of purge port 44
26 Positions of the cooling water port 45
27 Baking heater installation position 46
28 Pump operation method 1 54
29 Pump operation method 2 54
30 "ROTATION" LED Indication 56
31 X2 REMOTE connector 57
32 X2 REMOTE input signal pins (contact input) 60
33 X2 REMOTE output signal pins 66
34 Serial port 69
35 X3/X4 connector (D-Sub9) 71
36 RS485 connections 72
37 Grounding example (Both ends grounding) 76
38 Grounding example (single point grounding) 76
39 Example of ring ferrite core installation 77
40 Example of cable installation in metallic duct 77
41 Example of differential signal waveform 78
42 PC to SIM communication 79
43 Block diagram of communication process example 89
44 Example of answer resending process 90
45 Example of response when the command is sent continuously 90
46 Example of command sending during answer data reply 90
47 Example of communication cycle process 91
48 Example of command sending process 92
49 Example of answer receiving process 92

Edwards STP-XF813 Series Specifications

General

Brand	Edwards
Model	STP-XF813 Series
Category	Water Pump
Language	English