STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page iv
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
6 STP-LINK AND DISPLAY UNIT 129
6.1 STP-Link 129
6.2 Display unit 130
7 SAFETY FUNCTIONS 131
7.1 Safety functions 131
7.1.1 Power Failure 131
7.1.2 Operation after a power recovery 132
7.1.3 Abnormal state of magnetic bearing (Disturbance) 133
7.1.4 Excessive vibration (Disturbance) 133
7.1.5 Motor driver overload (DRV Overload) 133
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 133
7.1.7 Overheating inside the control unit (CNT Overheat) 133
7.1.8 Overspeed 134
7.2 "WARNING" function 134
7.2.1 "WARNING" function 134
7.3 Contents of WARNING function 136
7.3.1 First Damage limit 136
7.3.2 Second Damage Limit 136
7.3.3 Pump run time over 136
7.3.4 Pump Overload 137
7.3.5 Imbalance 137
7.4 WARNING function setting 138
7.5 Troubleshooting immediately after failure occurs 139
7.5.1 After power failure 139
7.5.2 After other abnormality/error 139
7.6 Troubleshooting 140
7.6.1 Indication of "FAILURE" LED (red) 140
7.6.2 Indication of "FAILURE" LED (green) 147
7.6.3 No Indication of the "FAILURE" LED 147
8 MAINTENANCE AND INSPECTION 149
8.1 Maintenance and inspection 149
8.2 Cleaning 150
8.3 Inspecting the deposit 150
8.4 Maintenance 151
8.4.1 Recommended overhaul intervals 151
8.4.2 Standard replacement parts 151
8.4.3 Recommended maintenance intervals for main parts 152
8.5 Transporting for repair or overhaul 153
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