A732-01-880 Issue D
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Maintenance
Protect sealing-faces from damage.
Do not touch or inhale the thermal breakdown products of fluorinated materials which may be present in the
pump if the pump has been heated to 260 °C and above. Fluorinated materials are safe in normal use but can
decompose into very dangerous substances (which may include hydrofluoric acid) if they are heated to
260 °C and above. The pump may have overheated if misused or in a fire. Health and Safety Data sheets for
fluorinated materials used in the pump are available on request; contact the supplier or Edwards.
5.2 Maintenance plan
The plan shown in Table 8 details the routine maintenance operations necessary to maintain the pump in normal use.
Instructions for each operation are given in the section shown.
More frequent maintenance may be required if the pump is used to pump corrosive or abrasive gases and vapours.
5.3 Inspect and clean the inlet strainer
Whenever disconnecting the pump from the vacuum system, Edwards recommends:
Removing any debris trapped by the inlet strainer (in the inlet port).
Inspecting the inlet strainer and if necessary, clean with a cleaning solution suitable for the substances
pumped. Refit the inlet strainer before reconnecting the pump to the vacuum system.
1. Refer to Figure 5. Disconnect the vacuum system from the pump inlet-port (3) and remove the centring-ring and
strainer assembly (1) and the O-ring (2). Inspect the centring-ring and the O-ring. If clean, continue at Step 5. If
not clean, continue at Step 2.
2. Remove the O-ring (2) from the centring-ring and strainer assembly (1). Do not allow the O-ring to come into
contact with the cleaning solution.
3. Wash the centring-ring and strainer assembly in a suitable cleaning solution and allow it to dry.
4. If necessary, wipe the O-ring with a clean, dry, lint-free cloth.
5. Refit the centring-ring and strainer assembly and the O-ring to the inlet port. Refit the vacuum system to the
pump inlet port.
Table 8 - Maintenance plan
Operation Frequency Refer to Section
Inspect and clean inlet strainer Annually 5.3
Clean the external fan cover Annually 5.4
Replace the tip seal Annually or as required 5.5
Test the motor / drive condition 15000 hours 5.6
Replace the bearings 35000 hours Refer to Edwards