entegris NOWPak - Table of Contents

2 User Manual | Entegris, Inc.
NOWPAK LINER-BASED CANISTER SYSTEM
TABLE OF CONTENTS
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Section 1: Overview ........................................................... 3
Safety Information ........................................................... 3
System Information ......................................................... 3
Canister System Components ..................................... 3
Handling the Canister ..................................................... 3
Refurbishing and Refilling the Canister ...................... 3
Additional Guides ............................................................. 3
Section 2: Safety................................................................. 3
General Safety Precautions ........................................... 3
Technical Support ............................................................ 4
Section 3: System Information ....................................... 4
Section 4: Canister System Components .....................5
Liner-Based Canisters ..................................................... 5
Replacement Liners ........................................................ 5
Retainers ............................................................................ 6
Fitment Adapters .............................................................. 6
Diptube ............................................................................... 6
Replacement Breakseals .................................................7
Canister Closures ..............................................................7
Two-Piece Closures ..............................................7
One-Piece Closure ............................................... 8
Chemical Dispense Connectors .................................. 8
NDCD Dispense Connectors ........................... 8
NDLD Dispense Connectors ............................ 9
NDED MaxMT™ Dispense System ................... 9
Section 5: Handling the Canisters.................................. 9
Moving the Canisters .................................................... 10
Storing and Staging the Canisters ............................. 10
Storing the Filled Canisters ............................... 10
Staging Filled Canisters ...................................... 10
Section 6: Refurbishing and Filling the Canisters ..... 10
Empty Canister Disassembly and
Liner Removal ................................................................ 10
Inserting Two-Dimensional Replacement
Liners Into the Canister ................................................12
Inserting Three-Dimensional Conformal
Liners Into the Canister ................................................ 13
Inflating a Liner Inside a Canister .............................. 15
Using a Bag Inflation Fixture (BIF ................... 15
Manual Liner Inflation Fixture ........................... 15
Canister Filling and Diptube Insertion .......................17
Capping a Filled Canister ............................................. 18
Two-Piece Closures ........................................... 18
One-Piece Closures ............................................ 19
Canister Assembly Overview ......................................20
Canister Shipment .........................................................20
Section 7: Canister System Maintenance ....................21
Diptube Maintenance ................................................... 21
Closure Maintenance ....................................................23
Dispense Connector Maintenance ...........................24
O-Ring Handling Guidelines .............................25
Section 8: Using the Canister System ......................... 25
End User Procedures .................................................... 25
Installing a Dispense Connector to the
Production Tool ...................................................25
Connecting the Dispense Connector to
a Canister ..............................................................26
Dispensing Chemical From the Canister ......26
Changing Out Empty Canisters ....................... 27
Troubleshooting Chemical Leaks ..................... 27
Appendix A: Required Tools .......................................... 28
Appendix B: Canister Compatibility Matrix ................ 32
Appendix C: Ordering Guide ......................................... 34