Entegris
®
, the Entegris Rings Design
®
, and other product names are trademarks of Entegris, Inc. as listed
on entegris.com/trademarks. All third-party product names, logos, and company names are trademarks or
registered trademarks of their respective owners. Use of them does not imply any aliation, sponsorship,
or endorsement by the trademark owner.
©2013-2022 Entegris, Inc. | All rights reserved. | Printed in the USA | 7124-12018TAN-0622
129 Concord Road
Billerica, MA 01821
USA
Tel +1 952 556 4181
Fax +1 952 556 8022
Toll Free 800 394 4083
Corporate Headquarters Customer Service
LIMITED WARRANTY
Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information,
visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any
failure in the case of customers using unapproved foreign components.
FOR MORE INFORMATION
Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit entegris.com and select the Contact Us link to find the customer service center nearest you.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit entegris.com and select the Terms & Conditions link in the footer.
www.entegris.com
User Manual | Entegris, Inc.
APPENDIX C: ORDERING GUIDE
—
Visit www.entegris.com for ordering information for the NOWPak liner-based canister system components.
To order accessories and spare parts, contact Entegris at +1 978 436 6500.
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