HELIX Compressor 9600 - Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation

9600 Compressor Installation, Operation, and Maintenance
P/N 8040540 3-15
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HELIX TECHNOLOGY CORPORATION
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TI C
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OG
EN
ICS
NOTE: The Cryo-Torr Interface can be installed at the process tool
containing the cryopumps as shown in Figure 3-8 or near the Compressor
as shown in Figure 3-9. CTI-CRYOGENICS recommends that the Cryo-
Torr Interface be installed at the process tool to reduce cable requirements.
Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation
CRYOPUMP POWER CABLE
USER REMOTE
(FROM VACUUM SYSTEM)
HELIUM SUPPLY
HELIUM RETURN
WATER
POWER
CRYO-TORR
INTERFACE
REMOTE