Inficon Gemini MAG500 - Page 20

20 tina83e1-d (2018-12)
where: Gas type K
Air (N
2
, O
2
, CO)
1.0
Xe
0.4
Kr
0.5
Ar
0.8
H
2
2.4
Ne
4.1
He
5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this
case, accurate determination is only possible with a
partial pressure measurement instrument, e.g. a
quadrupole mass spectrometer.