EasyManua.ls Logo

Inficon Transpector XPR 3+ User Manual

Inficon Transpector XPR 3+
130 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Page #1 background imageLoading...
Page #1 background image
Transpector XPR 3+
OPERATING MANUAL
Gas Analysis System
PN 074-687-P1A
C
over
P
age
®

Table of Contents

Question and Answer IconNeed help?

Do you have a question about the Inficon Transpector XPR 3+ and is the answer not in the manual?

Inficon Transpector XPR 3+ Specifications

General IconGeneral
Response Time< 100 ms
Mass Range1 to 300 amu
FilamentDual filament
DetectorFaraday cup
Resolution0.5 amu at 10% valley
Ionization Energy70 eV
Faraday Sensitivity5 x 10^-5 A/mbar

Summary

Chapter 1 Getting Started

1.1 Introduction

Overview of the Transpector XPR 3+ Gas Analysis System.

1.2 Using This Manual

Guidance on how to read and understand the operating manual.

1.3 How To Contact Customer Support

Contact information for INFICON support worldwide.

1.4 Quick Start

Step-by-step guide to quickly start using the Transpector XPR 3+.

1.5 Purpose of Transpector XPR 3+ Gas Analysis System

Explains the function and purpose of the gas analysis system.

1.6 General Description of Transpector XPR 3+ Gas Analysis System

Provides a general overview of the system's components.

1.9 Physical Requirements

Details physical dimensions, weight, and mounting requirements.

1.10 Electrical Power Requirements

Specifies the required voltage and current for the system.

1.12 Required Vacuum

States the vacuum level required for operation.

1.13 Environmental Requirements

Details environmental conditions for operation.

1.16 Hardware Installation

Step-by-step guide for installing the hardware components.

1.16.1 Avoiding Process Metal Deposition

Instructions to prevent deposition on the sensor.

1.16.2 Installing the Isolation Valve

Instructions for installing the isolation valve.

1.16.5 Sensor Installation

Instructions for installing the sensor.

1.16.6 Electronics Module Installation

Instructions for installing the electronics module.

1.16.8 Installing Ethernet Communications

Instructions for connecting via Ethernet.

1.16.9 Connecting the 24 V(dc) Power Supply

Instructions for connecting the power supply.

1.17 Input/Output (I/O)

Describes the input and output functions of the system.

Chapter 2 Connecting Transpector XPR 3+

2.2 General Networking Information

Discusses networking variables affecting connection.

2.2.1 IP Addresses

Explains static vs. dynamic IP addresses.

2.3 Transpector XPR 3+ IP Address

Default IP address and network prefix information.

2.3.1 Changing Transpector XPR 3+ IP Address

Methods for changing the device's IP address.

2.3.1.2 Changing the Computer IP Address

How to change the host computer's IP address.

2.4 Connecting Transpector XPR 3+

Decision points before connecting the device.

2.4.1 Connecting a Single Transpector XPR 3+

Installation for a single unit connection.

2.4.2 Installing Multiple Transpector XPR 3+ Sensors

Procedures for installing multiple sensors.

Chapter 3 How The Instrument Works

3.2 Overview

General overview of the instrument's function and components.

3.4 Sensor

Detailed description of the sensor.

3.4.1 The Ion Source

Explanation of the ion source.

3.4.2 The Quadrupole Mass Filter

Description of the mass filter.

3.4.3 The Ion Detector

Details on the ion detector.

3.7 High Pressure Effects

Impact of high pressure on sensor.

Chapter 4 Applications Guide

4.1 How to Interpret the Result

Guide to interpreting measurement results.

4.1.1 Qualitative Interpretation of Mass Spectra

Identifying substances from spectra.

4.1.3 Additional Information for Interpreting Mass Spectra

Further details for mass spectra interpretation.

4.1.3.1 Ion source Characteristics

Ion source effects on detected concentrations.

4.1.3.3 Fragmentation Factors

Explanation of fragmentation factors.

Chapter 5 Transpector XPR 3+ Operation and Best Known Methods

5.2 Precautions for Operation

Safety and performance tips for operation.

5.3 Pirani Interlock Protection

Protection of filament emission via Pirani Interlock.

5.4 FabGuard Control

System configuration using FabGuard software.

5.4.1 Transpector XPR 3+ Configuration— I/O Tab

Configuring analog inputs within FabGuard.

5.5 Using Transpector XPR 3+

Procedures for using the Transpector XPR 3+.

5.5.1 Leak Detection

Performing leak detection using FabGuard Explorer.

5.5.4 Transpector XPR 3+ Filament

Filament lifespan and replacement recommendations.

5.5.5 High Pressure Electron Multiplier

HPEM usage, degradation, and replacement.

Chapter 6 Transpector XPR 3+ Low Pressure EM

6.2 Transpector XPR 3+ Filament Caution

Caution regarding filament operation at high pressures.

6.3 Electron Multiplier Caution

Caution regarding EM operation at high pressure/current.

Chapter 7 Maintenance

7.2 Safety Considerations

Safety precautions for maintenance.

7.2.3 Electrical Voltages

Electrical hazards during maintenance.

7.3 General Instructions For All Repair Procedures

General guidelines for repair procedures.

7.4 Maintenance Procedures

Procedures for maintaining the instrument.

7.4.1 Bakeout of Quadrupole

Procedure for baking the sensor under vacuum.

7.5 Repair Procedures

Procedures for repairing components.

7.5.3 Filament Kit Replacement

Step-by-step guide for replacing the filament kit.

7.6 Mass Calibration

Tuning and calibrating the mass scale.

7.6.1 Mass Alignment

Aligning the mass scale.

7.7 Pirani Interlock Adjustment Procedures

Adjusting the Pirani Interlock.

Chapter 8 Diagnosing Problems

8.2 Symptom-Cause-Remedy Chart

Chart to help diagnose and fix problems.

8.3 Communication Problems

Troubleshooting communication issues.

Chapter 9 Bibliography

Chapter 10 Glossary

Chapter 11 Transpector XPR 3+ Accessories and Spare Parts

11.2 Transpector XPR 3+ Accessories

Lists available accessories for the system.

11.3 Transpector XPR 3+ Spare Parts

Lists spare parts for maintenance and replacement.

11.3.1 Preventative Maintenance Parts

Lists parts for routine preventative maintenance.

11.3.2 Replacement Spare Parts

Lists parts for general replacement.

Chapter 12 Specifications

12.2 Mass Range

Specifies the mass range of the instrument.

12.3 Detector Type

Identifies the types of detectors used.

12.4 Resolution

Specifies the resolution of the mass filter.

12.6 Sensitivity

Details the sensitivity of the instrument.

12.7 Minimum Detectable Partial Pressure

Specifies the MDPP for different modes.

12.8 Maximum Operating Pressure

Specifies the maximum operating pressure limits.

12.9 Maximum Sensor Operating Temperature

Specifies the maximum sensor operating temperature.

Chapter 13 Supplied Items

13.1.1 Ship Kit

Lists the contents of the ship kit.

13.1.2 Electronics Module

Lists available electronics modules.

13.1.3 Power Supply

Lists available power supply kits.

13.1.4 Sensor

Lists available sensor part numbers.

Related product manuals