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Transpector XPR 3+
Inficon Transpector XPR 3+ User Manual
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Transpector XPR 3+
OPERA
TING
MANUAL
Gas Analysis System
PN 074-687-P1A
C
over
P
age
®
2
Table of Contents
Table of Contents
4
Getting Started
9
Introduction
9
Using this Manual
9
Note and Hint Paragraphs
9
Warning and Caution Paragraphs
10
How to Contact Customer Support
10
Returning Transpector XPR 3+ to INFICON
11
Quick Start
11
Purpose of Transpector XPR 3+ Gas Analysis System
11
General Description of Transpector XPR
12
Gas Analysis System
12
Specifications for Transpector XPR 3+ Gas Analysis System
12
Supplied Items
12
Physical Requirements
13
Physical Dimensions
13
Weight
14
Mounting Requirements
14
Ventilation Requirements
14
Maintenance Access
14
Electrical Power Requirements
14
Required Supply Voltage
14
Current Rating
14
Electrical Connection
14
Overvoltage Category
15
Required Vacuum
15
Environmental Requirements
15
Use
15
Altitude Range
15
Pollution Degree
15
Operating Temperature
16
Humidity
16
Computer System Requirements
16
Software Installation
16
Hardware Installation
16
Avoiding Process Metal Deposition
17
Installing the Isolation Valve
19
Mounting the Pirani Interlock Weldment Assembly
25
Mounting the Pirani Gauge
26
Sensor Installation
27
Electronics Module Installation
30
Initial Start-Up Procedure
31
Installing Ethernet Communications
31
Connecting the 24 V(DC) Power Supply
32
Connecting the Pirani Interlock Cable
32
Attaching Heating Jackets
33
Input/Output (I/O)
33
Two Digital Inputs
34
One Status Relay Output
34
One Analog Input
36
Connecting Transpector XPR 3
37
Introduction
37
General Networking Information
37
IP Addresses
37
Subnetworking
39
Transpector XPR 3+ IP Address
39
Changing Transpector XPR 3+ IP Address
39
Connecting Transpector XPR 3
46
Connecting a Single Transpector XPR 3
47
Installing Multiple Transpector XPR 3+ Sensors
47
How the Instrument Works
49
Introduction
49
Overview
49
Patents
49
Sensor
51
The Ion Source
53
The Quadrupole Mass Filter
54
The Ion Detector
56
Scanning Characteristics
58
The Zero Blast
58
High Pressure Effects
59
Applications Guide
61
How to Interpret the Result
61
Qualitative Interpretation of Mass Spectra
61
Quantitative Interpretation of Mass Spectra
69
(Calculating Partial Pressures)
69
Additional Information for Interpreting Mass Spectra
75
Transpector XPR 3+ Operation and Best Known Methods
79
Introduction
79
Precautions for Operation
80
Pirani Interlock Protection
80
Fabguard Control
80
Transpector XPR 3+ Configuration- I/O Tab
80
Using Transpector XPR 3
84
Leak Detection
84
Recipe Generation
85
Mass Scale Tuning
85
Transpector XPR 3+ Filament
85
High Pressure Electron Multiplier
85
Transpector XPR 3+ Low Pressure EM
87
Introduction
87
Transpector XPR 3+ Filament Caution
87
Electron Multiplier Caution
87
Quick Start
88
Purpose of the Transpector XPR 3+ Low Pressure EM Option Gas Analysis System
88
General Description of Transpector XPR 3+ Low Pressure EM Option Gas Analysis System
89
Specifications for Transpector XPR 3+ Low Pressure EM Option Gas Analysis System
90
Supplied Items
91
XPR 3+ Low Pressure EM Installation
91
XPR 3+ Low Pressure EM Operation
91
Introduction
92
Safety Considerations
92
Toxic Material
92
Radiation
92
Electrical Voltages
93
General Instructions for All Repair Procedures
93
Maintenance Procedures
94
Bakeout of Quadrupole
94
Spare Heating Jacket Part Numbers
94
Repair Procedures
95
Tools Required
95
How to Determine if a Filament Kit Replacement Is Required
96
Filament Kit Replacement
96
How to Determine the Condition of the Ion Source
98
Mass Calibration
100
Mass Alignment
100
Pirani Interlock Adjustment Procedures
101
INFICON PSG500 Adjustment Instructions
101
Diagnosing Problems
104
Introduction
104
Symptom-Cause-Remedy Chart
104
Communication Problems
109
Bibliography
110
Glossary
111
Transpector XPR 3+ Accessories and Spare Parts
118
Introduction
118
Transpector XPR 3+ Accessories
118
Transpector XPR 3+ Spare Parts
119
Preventative Maintenance Parts
119
Replacement Spare Parts
119
Specifications
121
Introduction
121
Mass Range
121
Detector Type
121
Resolution
121
Temperature Coefficient
121
Sensitivity
122
Maximum Operating Pressure
122
Maximum Sensor Operating Temperature
122
Maximum Bakeout Temperature
123
Operating Temperature
123
Power Input
123
Ethernet Communication Interface
123
Relay Outputs
123
Inputs
123
Indicators (Green)
123
Supplied Items
124
Introduction
124
Ship Kit
124
Electronics Module
125
Power Supply
125
Sensor
126
Software
126
Heating Jacket System (Optional)
126
Interlock Kit (Optional)
126
Angle Valve (Optional)
127
5
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Inficon Transpector XPR 3+ Specifications
General
Brand
Inficon
Model
Transpector XPR 3+
Category
Measuring Instruments
Language
English
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