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Transpector XPR 3+ Operating Manual
1.3.1 Returning Transpector XPR 3+ to INFICON
Do not return any component of Transpector XPR 3+ to INFICON before speaking
with a Customer Support Representative and obtaining a Return Material
Authorization (RMA) number. Transpector XPR 3+ will not be serviced without an
RMA number.
Prior to being given an RMA number, a Declaration Of Contamination (DOC) form
may need to be completed if the sensor has been exposed to process materials.
DOC forms must be approved by INFICON before an RMA number is issued.
INFICON may require that the sensor be sent to a designated decontamination
facility, not to the factory.
1.4 Quick Start
Read this Operating Manual in full prior to operating Transpector XPR 3+. Then,
follow the steps below to quickly start using Transpector XPR 3+.
1 Ensure that all supplied items have been received. See Chapter 13,
Supplied Items.
2 Install the hardware. See section 1.16, Hardware Installation, on page 1-8.
3 Install the communication cable. See section 1.16.8, Installing Ethernet
Communications, on page 1-23.
4 Install the software. Refer to the FabGuard Explorer Operating Manual for
information on installing the software.
NOTE: Transpector XPR 3+ requires FabGuard version 17.04.00 or higher for
operation.
1.5 Purpose of Transpector XPR 3+ Gas Analysis System
Transpector XPR 3+ Gas Analysis System is a quadrupole-based residual gas
analyzer that operates at Physical Vapor Deposition (PVD) process pressures and
has an Electron Multiplier that can operate at 20 mTorr operating pressures. The
miniature quadrupole sensor analyzes gases by:
ionizing some of the gas molecules
separating the ions by their mass-to-charge ratio
measuring the quantity of ions at each mass
The masses, unique for each substance, allow the identification of the gas
molecules from which the ions were created. The magnitudes of these signals are
used to determine the partial pressures (amounts) of the respective gases.
Transpector XPR 3+ measures major components and impurities in a process with
a 10 ppm detection limit.
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