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Inficon Transpector XPR 3+ - 7.5.4 How to Determine the Condition of the Ion Source

Inficon Transpector XPR 3+
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7 - 7
Transpector XPR 3+ Operating Manual
Figure 7-4 Filament in place on sensor
4 While holding the short end of the hex wrench, alternately tighten the screws
until the hex wrench begins to flex. Alternately use a torque-limiting screwdriver
(IPN 02-389-P1 or equivalent), torque the screws to 10-12 oz In. (0.0384 Nm
to 0.0461 Nm).
CAUTION
Do not touch the filament wires.
7.5.4 How to Determine the Condition of the Ion Source
1 Remove the Transpector XPR 3+ sensor from the vacuum system.
2 Completely loosen the two 1-72 x 0.31 in. long gold plated cap head screws
that hold the filament assembly to the ion source plate. Remove the filament
assembly and screws. See Figure 7-5.
Face of repeller parallel to face of anode

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