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Transpector XPR 3+ Operating Manual
5.2 Precautions for Operation
There are some precautions that the operator should take to maintain sensor
performance and extend filament life. It is recommended that the
Transpector XPR 3+ filament emission be turned off manually, before
maintenance, to allow cooling before exposure to the vent gas. If manual shutdown
does not happen, the interlock will turn off the filament when the vent gas is
introduced.
The point of greatest risk to air exposure is after maintenance where the process
chamber has been exposed to air. Recommended operation after maintenance is
to pump down the chamber and Transpector XPR 3+ Sensor followed by a bakeout
with the Transpector XPR 3+ Sensor heater (and isolation valve heater, if present).
Following bakeout and cool down, the base pressure should be < 10
-6
Torr for safe
turn on of the filament.
See Chapter 7 for specific Maintenance Procedures.
5.3 Pirani Interlock Protection
Filament interlock protection for Transpector XPR 3+ allows the XPR 3+ filament
emission to operate at safe pressures (< 2x10
-2
Torr) by action of the Pirani
Emission OFF Interlock function. Protection is provided by a Pirani gauge, which
directly monitors pressure at the XPR 3+. Interlock protection turns off the XPR 3+
filament if the pressure increases above a maximum operating limit (< 2x10
-2
Torr)
and does not allow the filament to be turned on when pressures exceed this limit.
This chapter describes the interlock apparatus and its operation.
Interlock Protection:
prevents inadvertent turn on of the XPR 3+ emission at high pressures,
safely turns off the XPR 3+ filament when process pressures exceed a selected
pressure (the default / maximum value is 20 mTorr), and
(optionally) turns the XPR 3+ emission on at a different safe pressure (the
default for this option is OFF).
5.4 FabGuard Control
5.4.1 Transpector XPR 3+ Configuration— I/O Tab
Transpector XPR 3+ RGAs have one analog input for bringing in data from devices
such as external pressure gauges. The I/O section configures the analog input.
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