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Transpector XPR 3+ Operating Manual
6.4 Quick Start
To quickly put Transpector XPR 3+ Low Pressure EM Gas Analysis System to
work, perform the following tasks.
1 Check to ensure that everything has been receive.
See section 6.8, Supplied Items, on page 6-5.
2 Install the Hardware. See Chapter 1 Getting Started.
3 Install the Software. See Chapter 1 Getting Started.
4 Review the Transpector XPR 3+ Operating Manual, Chapter 5, Operation,
before using Transpector XPR 3+ Low Pressure EM.
6.5 Purpose of the Transpector XPR 3+ Low Pressure EM Option
Gas Analysis System
Transpector XPR 3+ Low Pressure EM Gas Analysis System is a
quadrupole-based residual gas analyzer that operates at process pressures up to
10 mTorr (20 mTorr with the Pirani Interlock option). It has an Electron Multiplier that
can operate at pressures up to 1x10
-4
Torr. The miniature quadrupole sensor
analyzes gases by:
ionizing some of the gas molecules
separating the ions by mass
measuring the quantity of ions at each mass
The masses allow the identification of the gas molecules from which the ions were
created. The magnitudes of these signals are used to determine the partial
pressures (amounts) of the respective gases.
Transpector XPR 3+ is an important aid in the efficient use of a high-vacuum
system, detecting leaks and contaminants. It can indicate the partial pressures of
gases characteristic of processes occurring within a vacuum or other vessel, and
therefore, can be used to investigate the nature of a process or to monitor process
conditions.
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