Inficon Transpector XPR 3+ - 1.16.2 Installing the Isolation Valve

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Transpector XPR 3+ Operating Manual
1.16.2 Installing the Isolation Valve
Transpector XPR 3+ should be installed on a 90° high-conductance isolation valve
(1.5 in. [38 mm] outer diameter) mounted on the process chamber. This prevents
line-of-sight deposits, from the plasma, from reaching the Transpector XPR 3+
Sensor. (See Figure 1-5.) The isolation valve may be provided by the user, or
purchased from INFICON (see below). The isolation valve must be bakeable and
needs to be fitted with a heating jacket designed for baking the valve.
 1½" Right Angle Valve Hand Operated with Heating Jacket:
IPN 914-024-G1
 1½" Right Angle Valve Air Operated with 24 V(dc) Solenoid and
Heating Jacket: IPN 961-025-G1
 Valve Heating Jacket (150 °C; 120/230 V(ac) Operation):
IPN 914-407-P1
Figure 1-5 Typical Connection of a Transpector XPR 3+ to the process chamber
1.16.2.1 Notes for Air Operated Valve
The INFICON supplied air operated valve is a 1/8 in. ported, 3-way, single solenoid,
2-position spring return, Normally Open (NO) or Normally Closed (NC), general
purpose air valve. It is configured for 2-way, NC use, whereby the EXH port is
plugged and the air supply (60 - 100 psig) must be connected to the port
labeled IN. (See Figure 1-6.)
WARNING
The air pressure supplied to the valve must not exceed
100 psig.
Tool
Interlock Weldment
IPN 914-416-G1
16.71 in. (42.5 cm)
Pirani Gauge
8.3 in.
(21 cm)
7.2 in.
(18 cm)
Transpector XPR 3+
8.0 in.
(20.4 cm)
The 90° Isolation Valve is
located between the Tool
Chamber and Transpector XPR 3+.
IPN 918-401-P1
Manual
Air Operated
Heating Jackets