Inficon Transpector XPR 3+ User Manual

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Transpector XPR 3+ Operating Manual
7.6.1.3 Mass Scale Tuning with Process Gas
For mass scale tuning at process pressures, the following procedure should be
used to adjust the argon (40 AMU) and/or nitrogen (28 AMU). This tuning
procedure can be used for argon, argon-nitrogen, or argon-oxygen processes.
NOTE: For this mass scale tuning procedure, the Tune Mass Table should be the
default Tune list, which is masses 1, 2, 4, 28, 40, and 86. If this list is not
present when the Tune window is opened, modify the Tune Mass Table as
necessary to show only masses 1, 2, 4, 28, 40, and 86.
CAUTION
Do not attempt to remove masses 1, 2, 4, or 86 AMU from
the Tune Table or adjust the resolution at these masses.
7.7 Pirani Interlock Adjustment Procedures
Follow these procedures for adjusting the Pirani Interlock on XPR 3+.
7.7.1 INFICON PSG500 Adjustment Instructions
1 Mount the Pirani gauge on the vacuum system.
2 Apply power to the gauge, 24 V(dc). See Figure 7-6.

Inficon Transpector XPR 3+ Specifications

General

Brand	Inficon
Model	Transpector XPR 3+
Category	Measuring Instruments
Language	English