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Inficon Transpector MPH User Manual

Inficon Transpector MPH
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Transpector MPH
OPERATING MANUAL
Gas Analysis System
PN 074-555-P1C
C
over
P
age
®

Table of Contents

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Inficon Transpector MPH Specifications

General IconGeneral
TypeResidual Gas Analyzer (RGA)
Mass Range1 to 100 amu
DetectorFaraday Cup
ApplicationsLeak detection, vacuum system monitoring
Detection Limit5 x 10-14 Torr
Resolution0.5 amu
InterfaceEthernet

Summary

Declaration Of Conformity

Warranty

Chapter 1: Getting Started

1.1 Introduction

Overview of the Transpector MPH Gas Analysis System.

1.4 Quick Start

Steps to quickly begin using the Transpector MPH system.

1.6 General Description of the Transpector MPH Gas Analysis System

Overview of the system's components and their roles.

1.9 Physical Requirements

Details about the physical dimensions and installation needs.

1.9.1 Physical Dimensions

Provides the physical dimensions of the Transpector MPH unit.

1.9.3 Mounting Requirements

Specifies how and where the sensor should be mounted.

1.10 Electrical Power Requirements

Outlines the power specifications for the Transpector MPH.

1.12 Required Vacuum

Defines the necessary vacuum level for the sensor to operate.

1.16 Hardware Installation

Provides step-by-step instructions for installing the hardware components.

1.16.1 Sensor Installation

Detailed steps for installing the sensor onto the vacuum system.

1.16.1.1 Assembling ConFlat Flanges

Step-by-step guide for assembling ConFlat flanges correctly.

1.16.1.2 Attaching the Sensor to the Vacuum Chamber

Instructions on securely mounting the sensor to the vacuum chamber.

1.16.2 Electronics Module Installation

Steps to install the electronics module onto the sensor.

1.16.3 Installing Ethernet Communications

Guide for connecting the device via Ethernet for communication.

1.16.4 Connecting the 24 V(dc) Power Supply

Instructions for connecting the device to its power supply.

1.17 Installing the Pirani Interlock (Optional)

Instructions for installing the optional Pirani Interlock system.

1.18 Installing the HPR Calibration Reference (Optional)

Steps for installing the optional HPR Calibration Reference.

1.19 Input/Output (I/O)

Explains the input and output functions supported by the module.

1.19.1 Two Digital Inputs

Details the function and use of two digital inputs.

1.19.3 One Analog Input

Explains the function of the analog input.

Chapter 2: Connecting Transpector MPH

2.1 Introduction

Overview of the connection process using Ethernet.

2.2 General Networking Information

Discussion of networking variables affecting connection.

2.2.1 IP Addresses

Explanation of IP address types and INFICON recommendation.

2.3 Transpector MPH IP Address

Default IP address and network mask information.

2.3.1 Changing Transpector MPH IP Address

Methods for changing the device's IP address.

2.3.1.2 Changing the Computer IP Address

Steps to change the host computer's IP for communication.

Windows 7 Instructions

Specific steps for changing IP on Windows 7.

2.4 Connecting Transpector MPH

Details on how to connect the Transpector MPH to networks.

2.4.1 Connecting a Single Transpector MPH

Instructions for connecting one unit.

2.4.2 Installing Multiple Transpector MPH Sensors

Instructions for connecting multiple units.

Chapter 3: How The Instrument Works

3.2 Overview

General overview of the Transpector MPH Gas Analysis System.

3.3 The Ion Source

Detailed explanation of the ion source's operation.

3.3.1 Choosing the Proper Filament

Guidance on selecting the correct filament type.

3.4 The Quadrupole Mass Filter

Explanation of the quadrupole mass filter's function.

3.4.1 Scanning Characteristics

Discusses how the mass filter scans and its selectivity.

3.5 The Ion Detector

Description of the ion detector and its types.

3.5.2 The Electron Multiplier (EM) Detector

Explains the Electron Multiplier detector.

Chapter 4: Applications Guide

4.1 How to Interpret the Result

Guide on interpreting the measurements from the Transpector MPH.

4.1.1 Qualitative Interpretation of Mass Spectra

How to determine substances present based on mass spectra.

4.1.1.1 Ionization Process

Explains the ionization process in gas analysis.

4.1.1.2 Isotope Ratios

Discusses the impact of isotopes on mass spectra.

4.1.3 Additional Information for Interpreting Mass Spectra

Further details for mass spectra interpretation.

4.1.3.3 Fragmentation Factors

Explains fragmentation factors and their use.

Chapter 5: Using Transpector Web UI

5.1 Introduction

Introduces the Transpector Web UI for remote control.

5.2 System Requirements

Specifies requirements for using the Web UI on computers and mobile devices.

5.2.1 Using Transpector Web UI on Computers

Requirements for computer-based access.

5.3 Connecting to Transpector Web UI

Instructions for establishing a connection to the Web UI.

5.4 Navigating Transpector Web UI

Explains how to move between different windows in the Web UI.

5.4.1 STATUS

Description of the STATUS window and its information.

5.4.2 MONITOR

Description of the MONITOR window for data acquisition.

5.4.3 LEAKCHECK

Description of the LEAKCHECK window for leak detection.

5.5 Using Transpector Web UI

Provides instructions for common applications of the Web UI.

5.5.2 Standalone Transpector Web UI Operation

Instructions for using the Web UI as a standalone program.

5.5.2.1 Data Acquisition

How to acquire data using the MONITOR window.

5.5.2.1.1 Editable Parameters

Details the parameters that can be edited for data acquisition.

5.5.2.2 Leak Checking

Instructions for performing leak checks using the LEAKCHECK window.

5.5.2.2.2 Using the Leak Check Mode

Step-by-step guide for conducting a leak check.

5.5.2.3 Tune Mode

Instructions for tuning the Transpector MPH.

5.5.2.3.3 Tuning Transpector MPH

Detailed steps for tuning the instrument.

5.5.2.4.1 Manually Changing the IP address

Steps for manual IP address configuration.

5.6 Transpector Web UI Best Known Methods

Lists suggested applications for the Web UI.

5.6.1.1 Vacuum Diagnostics

Using Web UI for general vacuum diagnostics.

5.6.1.2 Leak Checking

Using Web UI for leak checking procedures.

5.7 Troubleshooting

Common problems and solutions for Transpector Web UI operation.

Chapter 6: Maintenance

6.2 Safety Considerations

Important safety precautions for maintenance.

6.2.3 Electrical Voltages

Warnings about electrical hazards during maintenance.

6.3 General Instructions For All Repair Procedures

General guidelines for performing repairs.

6.4 Maintenance Procedures

Specific maintenance tasks.

6.4.1 Bakeout of Quadrupole

Procedure for baking the quadrupole to restore performance.

6.5 Repair Procedures

Detailed steps for repairing components.

6.5.1 Tools Required

Lists tools needed for specific repair tasks.

6.5.1.1 Tools for Replacing the Filament Kit

Tools for filament replacement.

6.5.3 Filament Kit Replacement

Step-by-step guide for replacing the filament kit.

6.5.5 Electron Multiplier Replacement

Procedures for replacing the electron multiplier.

6.6 Calibration

Procedures for calibrating the instrument.

6.6.1 Mass Alignment

How to align the mass scale for accurate measurements.

6.6.1.2 Selecting Tune Masses

Guidance on choosing masses for tuning.

Chapter 7: Diagnosing Problems

7.2 Symptom-Cause-Remedy Chart

A table listing common problems and their solutions.

7.3 Communication Problems

Specific troubleshooting steps for communication issues.

Chapter 10: Transpector MPH Accessories and Spare Parts

10.2 MPH Accessories

List of available accessories with part numbers.

10.3 Transpector MPH Spare Parts

Lists spare parts for maintenance.

10.3.2 Replacement Spare Parts

Parts for replacing worn or failed components.

10.3.4 Spare Transpector MPH Sensors

Lists spare sensor units.

Chapter 11: Specifications

11.2 Sensor Length (Vacuum Side)

Specifies the sensor length.

11.3 Mass Range

Details the mass range capabilities of different models.

11.7 Sensitivity

Provides sensitivity figures for different models.

11.8 Minimum Detectable Partial Pressure

States the minimum detectable partial pressures.

11.11 Maximum Sensor Operating Temperature

States the maximum sensor operating temperature.

11.13 Operating Temperature

Defines the operating temperature range.

Chapter 12: Supplied Items

12.1.1 Ship Kit

Details the contents of the ship kit.

12.1.2 Electronics Module

Lists the available electronics modules.

12.1.4 Sensor

Lists the available sensor types.

12.1.5 Extension Kit

Lists the available extension kits.

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