6 - 3
Transpector MPH Operating Manual
6.4 Maintenance Procedures
6.4.1 Bakeout of Quadrupole
If the symptoms in section 7.2, Symptom-Cause-Remedy Chart, on page 7-1,
suggest that the sensor is contaminated, try first to restore normal performance by
baking the sensor under a high vacuum
—at least 1 x 10
-5
Torr (1.333 x 10
-5
mbar)
[1.333 x 10
-3
Pa]—for several hours, preferably overnight. Table 6-1 represents
the maximum bakeout temperatures.
If baking the sensor doesn’t increase the sensor performance, it may be necessary
to perform the tasks described in section 6.5.3, Filament Kit Replacement, on page
6-6 and also in section 6.5.4, Ion Source Removal, on page 6-9.
If the procedures explained above do not solve the problem, contact INFICON.
Refer to section 1.3, How To Contact Customer Support, on page 1-3.
When heating the sensor above 200C, the electronics
module and the signal contact must be removed from the
sensor.
6.4.2 Spare Heating Jacket Part Numbers
INFICON offers several heating jackets to help in baking a sensor. These heating
jackets operate at a maximum temperature of 150
C.
Heating jacket part numbers are shown in Table 10-1 on page 10-1.
Table 6-1 Maximum bakeout temperatures
While
Operating
With
Electronics
Removed
Faraday Cup Sensors 200
C300C
Electron Multiplier
Faraday Cup
Combination
EM Mode
FC Mode
150
C
200
C
300
C
300
C
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