Inficon Transpector MPH - Repair Procedures; Tools Required; Tools for Replacing the Filament Kit; Tools for Replacing the Ion Source

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Transpector MPH Operating Manual
6.5 Repair Procedures
6.5.1 Tools Required
6.5.1.1 Tools for Replacing the Filament Kit
 3 mm Nut Driver
 1/16 in. Flat Blade Screwdriver
6.5.1.2 Tools for Replacing the Ion Source
 1/16 in. Flat Blade Screwdriver
 #2 Phillips Head Screwdriver
 Precision Pliers
6.5.1.3 Tools for Replacing the Electron Multiplier
 1/16 in. Flat Blade Screwdriver
 Phillips Head Screwdriver
 1.5 mm x 50 mm Hex Driver
 2.0 mm x 75 mm Hex Driver
 Precision Pliers
 Non-Metallic Tweezers