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Inficon UL1000 Fab User Manual

Inficon UL1000 Fab
119 pages
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Catalog-No.
from software version
TECHNICAL HANDBOOK
UL1000 Fab and
UL1000
Helium Leak Detector
UL 1000:
550 - 000A
550 - 001A
550 - 002A
UL 1000 Fab:
550 - 100A
550 - 101A
V5.14
iina70e1-m (1408) Translation of the original handbook

Table of Contents

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Inficon UL1000 Fab Specifications

General IconGeneral
TypeHelium Leak Detector
Measurement PrincipleMass Spectrometry
Minimum Detectable Leak Rate (Helium)5 x 10^-12 mbar l/s
Response Time<1 second
Operating Temperature10°C to 40°C
Power Supply100-240 V AC, 50/60 Hz
MobilityPortable
ApplicationSemiconductor manufacturing, vacuum systems, and other high-sensitivity leak detection applications
Test PortKF25
InterfaceRS-232, Ethernet
Leak Detection Range5 x 10^-12 to 10^-2 mbar l/s

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