Inficon UL1000 Fab - 8000 Hours Maintenance; 16000 Hours Maintenance

To Next Page

To Previous Page

Maintenance Work 103

iina70e 09.fm technical handbook(1408)

Approximately 2.5 hours will be needed for this maintenance work, but will vary in

case that operating agent reservoir is exchanged.

9.5.3 8000 Hours Maintenance

The 8000 hours maintenance work should be done by an INFICON service

technician or a person authorised by INFICON.

For the scroll module of the Agilent scroll pump, the „tip seal“ must be replaced by

an INFICON service technician as soon as 8000 operating hours are attained. If the

„tip seal“ is not replaced, it will become necessary to replace the scroll module after

12000 operating hours.

Approximately 6.0 hours will be needed for this maintenance work. For the

replacement of the „Tip Seal“ additionally 3 hours are necessary.

9.5.4 16000 Hours Maintenance

The 16000 hours maintenance work should be done by an INFICON service

technician or a person authorised by INFICON.

As soon as 16000 operating hours have been attained, the life expectancy of the

various backing pump types has been reached.

Work to be done Required materials Part No.

Exchange the oil of the D16 backing

pump (UL1000 only)

Arctic Oil 1l 20099091

Check/replace the filter

Replacement filter cell for fan

Replacement filter for venting and

purge gas line

Silencer for exhaust (UL1000 Fab

only)

Oil filter insert (10 pcs.) UL1000 only

200000685

200000683

20099183

200000694

Test and alignment

Replace operating agent reservoir of

SplitFlow 80 only in case a 3 year

time period has elapsed. Please

refer to 9.5.5.

Operating agent reservoir for

SplitFlow 80

200003801

Work to be done Required materials Part No.

Replace tip seal (Agilent TS 620) Tip seal 200001671

Exchange oil for the D16 backing

pump (UL1000)