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Inficon UL1000 Fab - Maintenance Work; General Information on Maintenance

Inficon UL1000 Fab
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Maintenance Work 99
iina70e 09.fm technical handbook(1408)
9 Maintenance Work
9.1 General Information
Service level II and III maintenance work on the UL1000 Fab/UL1000 must only be
performed by personnel expressly authorised for this work by INFICON GmbH
Cologne.
Here note the corresponding service levels:
Service level I Customer
Service level II Customer with technical training
Service level III Authorised INFICON service technician
Notice: Complying with the maintenance plan given in the following is mandatory
for the UL1000 and UL1000 Fab/UL1000. If the corresponding
maintenance intervals are not complied with, this will then void your
warranty for this equipment.
Signing a maintenance contract for this equipment is recommended.
As soon as the different maintenance intervals are reached, a warning is displayed
on the screen of the leak detector of the UL1000 and UL1000 Fab/UL1000 each time
it is switched on. This message will remain on the display until the maintenance
interval has been acknowledged.
Depending on the application the leak detector is used in, the 1500 hrs maintenance
can be varied.
Caution
Please note the corresponding safety information in this chapter.
Caution
During work on the vacuum system make sure that the work environment is clean
and always use clean tools.
STOP
Danger
During all maintenance work on the UL1000 and UL1000 Fab/UL1000 be sure to
disconnect the leak detector from the mains power!

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