106 Maintenance Work
iina70e 09.fm technical handbook(1408)
9.7 Checking and Replacing the Filter Insert
The extent to which the air filter insert in front of the fans is contaminated should be
checked every three months (under aggravated conditions, monthly). Contaminated
filter inserts must be exchanged since under such circumstances the cooling
performance for the turbomolecular pump and the instrument itself is reduced.
Required tools
Side wall separator from the accessories
Required material
Replacement filter insert P/N 200 000 685
• To open the leak detector, refer to Chapter 1.6.1
• Take hold of the filter insert with two fingers at the locations shown in Fig. 1-2/a
and pull the filter insert out of the guide. Should this not be possible, use a tool to
press the filter through the rear ejection bore Fig. 9-2/3 to the front.
Before removing one of the covers of the UL1000 and UL1000 Fab/UL1000 the leak
detector must be disconnected from the mains power!
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