General Information 15
iina70e 01.fm technical handbook(1408)
1.3.2 Technical Data
1.3.2.1 Physical Data
Hinweis To get down to the minimum detected leak rate range some conditions
must be fulfilled:
• UL1000 and UL1000 Fab has fully warmed up
• Ambient conditions must be stable (temperature, no vibration/accelerations.)
• The part under test has been evacuated long enough (background is no longer
decreasing)
• ZERO must be active
1.3.2.2 Electrical Data
Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates
• in vacuum mode (ULTRA) <5×10
-12
mbar l/s
limit of detection in sniffer mode <5×10
-8
mbar l/s
Maximum displayable helium leak rate in ULTRA 0.1 mbar l/s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off,
63% of the final value)
<1 s
Pumping speed (Helium) at the inlet
Max. roughing capability 25 m
3
/h (50 Hz)
17.6 cfm (50 Hz)
30 m
3
/h (60 Hz)
21.1 cfm (60 Hz)
• in vacuum mode
– GROSS mode 8 l/s
– FINE mode 7 l/s
– ULTRA mode 2.5 l/s
Detectable masses 2, 3 and 4
Mass spectrometer 180° magnetic sector field
Ion source 2 filaments;
Iridium/Yttria-oxide
Inlet port DN 25 KF
Run-up time (after starting) 3 min
Part no. 550 - 000A, 550 - 100A 230 V 50 Hz
Part no. 550 - 001A, 550 - 101A 115 V 60 Hz
Part no. 550 - 002A 100 V 50/60 Hz
Power consumption 1100 VA
Type of protection IP20
Power cords (EU, USA, UK) 3 m
To Next Page
Loading...
