Description of the Menu 67
iina70e 06.fm technical handbook(1408)
6.6.1 Vacuum settings
• Main Menu > Settings > Vacuum settings
This menu allows to observe and to change the settings belonging to the vacuum
system.
6.6.1.1 Automatic purge (UL1000 Fab only)
• Main Menu > Settings > Vacuum settings > Automatic purge (UL1000 Fab only)
Through this menu it is possible to program the automatic purge (
Please refer to
Chapter
5.3.1) for 20 seconds when switching from measuring to standby mode.
6.6.1.2 Vent delay
• Main Menu > Settings > Vacuum settings > Vent delay
Through this menu item it is possible to define the delay time until the inlet port is
vented when operating the STOP button. When the STOP button is pressed for a
period of time which is shorter than the delay time specified here, the UL1000 and
UL1000 Fab will just change to Stand-by mode.
When the STOP button is pressed for a period of time which is longer than the delay
time specified here, the UL1000 and UL1000 Fab will vent the inlet port.
Softkey 2: Automatic purge (UL1000 Fab only)
Refer to chapter 6.6.1.1
Softkey 3: Vent delay
Refer to chapter 6.6.1.2
Softkey 4: Vacuum ranges
Refer to chapter 6.6.1.3
Softkey 5: Auto Leak Test adjustments
Refer to chapter 6.6.1.6
Softkey 6: Leak rate internal test leak
Refer to chapter 6.6.1.4
Softkey 7: Machine factor
Refer to chapter 6.6.1.5
Softkey 3: OFF
Automatic purge is switched off at standby mode.
Softkey 7: ON
Automatic purge is activated. When switching from measurement to STAND-BY the
forepump is rinsed automatically for 20 seconds.
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