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Inficon Gemini MPG504 User Manual

Inficon Gemini MPG504
64 pages
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tina83e1-d (2018-12) 1
Cold Cathode Gauge
Gemini MAG500, MAG504
Gemini MAG550, MAG554
Cold Cathode Pirani Gauge
Gemini MPG500, MPG504
Gemini MPG550, MPG554
Operating Manual
Incl. EU Declaration of Conformity
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Inficon Gemini MPG504 Specifications

General IconGeneral
Accuracy (Capacitive)±0.25% of reading
Protection ClassIP40
Measurement PrinciplePirani, Capacitive
Measurement Range (Pressure)1E-4 Torr to 1000 Torr
Response Time<1 second
Operating Temperature0°C to 50°C
Storage Temperature-20°C to 70°C
Power Supply+24 VDC ±10%
Communication ProtocolRS-485

Summary

Product Identification

Safety Information and Personnel

General Safety and Liability

General Safety Instructions

General safety guidelines and precautions for handling and operating the gauge.

Technical Data: Performance Specifications

Gauge Dimensions and Physical Layout

Measuring Signal vs. Pressure (MAG5xx, N)

Measuring Signal vs. Pressure (MAG5xx, Q)

Measuring Signal vs. Pressure (MPG5xx, P)

Gas Type Dependence for MAG5xx Gauges

MAG5xx Gas Type Correction Factors Table

Gas Type Dependence for MPG5xx Gauges

MPG5xx Gas Type Dependence (Low Pressure)

MPG5xx Gas Type Correction Factors Table

Installation Procedures

Vacuum System Connection Safety

Instructions and safety warnings for connecting the gauge to the vacuum system.

Grounding and Component Handling Precautions

Details on grounding, handling vacuum and dirt-sensitive components.

Gauge Mounting and System Connection

Guidance on gauge mounting orientation and connecting to the vacuum system.

Power Connection and Signal Quality

Power Connection Guidelines

Guidelines for connecting the gauge to the power supply safely and effectively.

Connector Interfaces

Operation: Status Indicators

MAG50x Status Indication Guide

Explains the meaning of different LED states for the MAG50x series.

MPG50x Status Indication Guide

Explains the meaning of different LED states for the MPG50x series.

Putting Gemini Gauges into Operation

MAG5xx Operation Startup

Steps to put MAG5xx gauges into operation via FCC or D-sub connectors.

MPG5xx Operation Startup

Steps to put MPG5xx gauges into operation and required stabilizing time.

Gauge Measurement Principle and Behavior

Gas Type Measurement Dependence

Explains that readings are gas-dependent and require correction.

Ignition Delay and Contamination Effects

Deinstallation Procedures and Safety

Handling Contaminated Parts During Deinstallation

Safety precautions for dealing with potentially contaminated parts during removal.

Gauge Removal and Protection

Physical Gauge Removal and Protection

Steps for physically removing the gauge from the system and protecting it.

Maintenance and Repair Overview

Gauge Adjustment Procedures

Instructions for adjusting the MAG5xx and MPG5xx gauges, including calibration.

Performing Gauge Zero Point Adjustment

Zero Point Adjustment Steps

Detailed steps for performing zero point adjustment using the <ADJ> button or interfaces.

Cleaning and Replacing Gauge Parts

Handling Contaminated Components

Procedures for cleaning the gauge and replacing defective parts like the Pirani filament.

Troubleshooting the Measuring Chamber

Safety with Cleaning Agents

Warnings and precautions related to the use and disposal of cleaning agents.

Measuring Chamber Troubleshooting Steps

Component Removal and Inspection

Instructions for removing and inspecting the measuring chamber and ionization chamber.

Electrical Fault Diagnosis

Ohmmeter Measurements for Fault Identification

Using an ohmmeter to perform measurements on contact pins for fault identification.

Replacing Ionization Chamber and Ignition Aid

Procedure for replacing the ionization chamber and ignition aid.

Replacing the Ignition Aid Procedure

Ignition Aid Removal and Preparation

Step-by-step guide for removing and preparing the ignition aid for replacement.

Anode Preparation for Reassembly

Finishing and Cleaning the Measuring Chamber Walls

Installing the New Ignition Aid

Ignition Aid Insertion into Mounting Tool

Guide for inserting the new ignition aid into the mounting tool and onto the anode.

Installing New Ionization Chamber and Measuring Chamber

Ionization Chamber and Retaining Ring Installation

Steps for inserting the new ionization chamber and mounting the retaining ring.

Measuring Chamber Assembly

Final steps for assembling the cleaned or new measuring chamber cpl.

Replacing the Measuring Chamber Assembly

Setting Spare Sensor Calibration Value

Instructions for setting the calibration value of the new spare sensor.

Finalizing Measuring Chamber Replacement

Securing and Adjusting New Measuring Chamber

Steps for inserting, fastening, and adjusting the new measuring chamber.

MPG5xx Specific Adjustment

Details on performing ATM and HV adjustment for MPG5xx after replacement.

General Troubleshooting Steps

Power Cycling for Basic Troubleshooting

Basic troubleshooting step of power cycling the gauge.

Troubleshooting: Signal Output Issues

Troubleshooting: Voltage Output Deviations and Pirani Issues

Spare Parts: Ignition Aid and Ionization Chamber

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