Inficon Gemini MPG504

tina83e1-d (2018-12) 17
Measurement range 0.667 … 10 V (3MAx-xxx-xxxQ)
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–10
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.52.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
Pressure p
Measurement signal U [V]
1E–02
1E–03
1E–04
1E–05
Pa
mbar
torr
0.667
sensor error
underrange
overrange
p = 10
(U-c)/1.33
⇔
U = c + 1.33 log p
valid in the range 1×10
-9
mbar < p < 1×10
-2
mbar
7.5×10
-10
Torr < p < 7.5 ×10
-3
Torr
1×10
-7
Pa < p < 1 Pa
mbar Pa Torr
c
12.66
10
12.826
where p pressure
U measurement signal
c constant (pressure unit dependent)