Inficon Gemini MPG504

tina83e1-d (2018-12) 21
2.3 Gas Type Dependence MPG5xx
Indication range from 10
2
… 10
-2
mbar
(Pirani-only operation)
Indicated pressure (gauge calibrated for air)
p [mbar]
p
eff
[mbar]
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
10
–2
H
2
He Ne
Air
N
2
O
2
CO
10
–3
2 4 6
10
–2
10
–1
10
0
10
1
10
2
8 2 4 6 8 2 4 6 8 2 4 6 8 2 4 6 8
Water vapor
Indication range
above 10
-2
mbar
Xe
Kr
Ar
CO
2
Freon 12