Inficon Gemini MPG504

18 tina83e1-d (2018-12)
Measurement range 1.398 … 8.6 V (3MBx-xxx-xxxP)
1E+04
1E+02
1E+00
1E–02
1E–04
1E–06
1E–08
0.0 0.5 2.5 3.5 4.5 5.5
6.5
7.5 8.5 9.5 10.5
Measurement signal U [V]
Pressure p
8.6
1.397
1E–09
sensor error
Pa
mbar
torr
1.217
underrange
overrange
p = 10
1.667U-d
⇔
U = c + 0.6 log p
valid in the range 1×10
-9
mbar < p < 1000 mbar
7.5×10
-10
Torr < p < 750 Torr
1×10
-7
Pa < p < 1×10
5
Pa
mbar
Pa
Torr
c 6.798 5.598 6.873
d
11.33
9.333
11.46
where p pressure
U measurement signal
c, d constant (pressure unit dependent)