Inficon Gemini MPG504 User Manual

tina83e1-d (2018-12) 53
Correction Turn on power supply. Replace ionization cham- ber or measuring cham- ber cpl.(→  44, 50). Switch on the high voltage (→  29). Evacuate the vacuum system to <10
-2
mbar and
switch the gauge off and on again via "HV ON". Wait, until the gas dis- charge has ignited (≈5 minutes at a pressure of 10
-9
mbar).
Switch the gauge off and on again after 5 s. Replace the gauge. Replace the measuring chamber cpl. (→  50).
Possible cause No supply voltage. Gauge contaminated. No high voltage in the measuring chamber. Overpressure in the measuring chamber. Gas discharge has not ignited. EEPROM error. Measuring chamber severely contaminated.
Status
signal
0 0 0 0 0
14.5 …
30 V
LED
<HV-ST>
off
lid solid
green
off
blinking
green
off
lid solid
green
LED
<ST>
off
lid solid
green
lid solid
green
lid solid
green
blinking
red
lid solid
green
Problem No voltage at signal output. Measuring signal unstable. Voltage at signal output 0.15 V Voltage at signal output 1.2 V (3MAx-xxx-xxxN) 0.4 V (3MAx-xxx-xxxQ). Voltage at signal output con- tinually < 0.3 V (3MAx-xxx-xxxN) < 0.5 V (3MAx-xxx-xxxQ). Signal continually at approx. 5×10
-4
mbar.

Inficon Gemini MPG504 Specifications

General

Brand	Inficon
Model	Gemini MPG504
Category	Measuring Instruments
Language	English