tina83e1-d (2018-12) 49
Remove particles in the measuring chamber by blowing
with dry nitrogen (while the vacuum flange of the measur-
ing chamber is pointing downward).
Slide a new ionization chamber (2) into the measuring
chamber (3) until the mechanical stop is reached and
mount the retaining ring (1) (Spare Parts
→ 57).
3
2
1
Observe correct
orientation of the
ionization chamber
We recommend to perform a leak test (leak rate
<1×10
-9
mbar l/s).
Carefully slide the measuring chamber cpl. (3) (clean or
new) into the electronics unit (5) until the mechanical stop
is reached …
Pins aligned straight.
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