Inficon Gemini MPG504

tina83e1-d (2018-12) 23
where: Gas type K
Air (N
2
, O
2
, CO)
1.0
Xe
0.4
Kr
0.5
Ar 0.8
H
2
2.4
Ne 4.1
He 5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this
case, accurate determination is only possible with a
partial pressure measurement instrument, e.g. a
quadrupole mass spectrometer.