114 Maintenance Work
iina70e 09.fm technical handbook(1408)
9.12 Scroll Pumps (UL1000 and UL1000 Fab only)
The maintenance intervals of the scroll pump (Agilent TS620) is given in the
maintenance plan detailed in 9.4.
We recommend to have this maintenance work done by the INFICON Service or a
service partner authorised by INFICON.
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