Inficon Transpector MPH - Conflat Flanges; Assembling Conflat Flanges; Attaching the Sensor to the Vacuum Chamber

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Transpector MPH Operating Manual
1.16.1.1 ConFlat Flanges
The sensor is installed on a vacuum system with a 2.75 in. DN40 ConFlat flange.
ConFlat flanges, and similar compatible types made by other manufacturers, are
used for attaching devices to ports on high vacuum systems. If there are no
concerns with the installation of this type of flange, proceed to section 1.16.1.2,
Attaching the Sensor to the Vacuum Chamber, on page 1-11.
NOTE: If the system does not have a port with a compatible mating flange, an
adapter will be necessary.
To install these flanges without leaks, follow proper operating procedures. These
flanges are sealed with a metal gasket and can be heated for bakeout to
temperatures of up to 300°C. For bakeout temperatures when a sensor is installed,
see Table 1-1 on page 1-13.
1.16.1.1.1 Assembling ConFlat Flanges
To assemble a pair of ConFlat flanges:
1 Wipe the sealing areas of the flanges with a laboratory towel using a clean
solvent, such as water free alcohol. These areas must be clean and free of
particulate matter.
CAUTION
Do not touch the gasket and flange faces with your
fingers during the installation process.
2 Install the copper gasket between the two flanges. (See Figure 1-3.) Always
use a new gasket. Do not attempt to use gaskets more than once.
Figure 1-3 Gasket and flange assembly
Flange
Flange
Copper Gasket