EasyManua.ls Logo

Inficon Transpector MPH - Ion Source Removal

Inficon Transpector MPH
160 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
6 - 9
Transpector MPH Operating Manual
6 Tighten the washers (A).
7 Insert the filament leads back into the clamps and tighten.
8 Using an ohmmeter, check that the filament is not shorted to ground and that
the filament shows a resistance of approximately 0.8 at the feedthrough.
6.5.4 Ion Source Removal
Proceed as follows to remove the ion source.
NOTE: See section 6.5.1.2, Tools for Replacing the Ion Source, on page 6-4
before continuing.
1 While holding the clamps with pliers, use the flat blade screwdriver to loosen
the clamps holding the filament leads (A) and ion source leads (B - one is
hidden in the figure). There are a total of six leads that need to be loosened.
Figure 6-6 Detach leads
A
B

Table of Contents

Related product manuals