Inficon Transpector MPH User Manual

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Transpector MPH Operating Manual
4 Carefully remove the new filament assembly from its packaging and place it on
the ion source standoffs.
CAUTION
The new filament assembly must be carefully placed onto
the ion source. Excessive horizontal movement will
cause the damage to the anode.
5 Replace the three washers and locknuts, and ensure that the anode (C) aligns
with the mating bore (D).
Figure 6-5 Align anode to mating bore
C
D

Inficon Transpector MPH Specifications

General

Brand	Inficon
Model	Transpector MPH
Category	Measuring Instruments
Language	English