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Inficon Transpector MPH - Page 119

Inficon Transpector MPH
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Transpector MPH Operating Manual
2 While holding the clamps with the pliers, use the flat blade screwdriver to
loosen the clamps holding the filament leads (B). Gently pull the leads away
from the filament assembly.
Figure 6-3 Remove the leads
3 Carefully pull the filament assembly from the ion source.
Figure 6-4 Remove the filament assembly
B

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