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Transpector MPH
Inficon Transpector MPH User Manual
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Declaration
Of
Conformity
Page
1
2
4
Table of Contents
Table of Contents
5
Getting Started
12
Introduction
12
Using this Manual
13
Note and Hint Paragraphs
13
Warning and Caution Paragraphs
13
How to Contact Customer Support
14
Returning Your Transpector MPH to INFICON
14
Quick Start
15
Purpose of the Transpector MPH Gas Analysis System
15
General Description of the Transpector MPH
16
Gas Analysis System
16
Specifications for the Transpector MPH Gas Analysis System
16
Supplied Items
16
Physical Requirements
17
Physical Dimensions
17
Weight
17
Mounting Requirements
18
Ventilation Requirements
18
Maintenance Access
18
Electrical Power Requirements
18
Required Supply Voltage
18
Current Rating
18
Electrical Connection
18
Overvoltage Category
19
Required Vacuum
19
Environmental Requirements
19
Use
19
Altitude Range
19
Pollution Degree
19
Operating Temperature
19
Humidity
19
Computer System Requirements
19
Software Installation
19
Hardware Installation
20
Sensor Installation
20
Conflat Flanges
21
Assembling Conflat Flanges
21
Attaching the Sensor to the Vacuum Chamber
21
Electronics Module Installation
25
Installing Ethernet Communications
26
Connecting the 24 V(DC) Power Supply
26
Installing the Pirani Interlock (Optional)
27
Installing the Pirani Gauge on to the Extension Flange
28
Installing the Extension Flange and Sensor Onto the Vacuum System
28
Connecting the Pirani Interlock Cable
29
Installing the HPR Calibration Reference (Optional)
30
Installing the Calibration Reference on to the Extension Flange
31
Installing the Extension Flange, Sensor, and Electronics Module
33
Connecting the HPR Valve Control Cable
33
Input/Output (I/O)
34
Two Digital Inputs
34
One Status Relay Output
34
One Analog Input
36
Installing the Heater Jacket Mount Kit (Optional)
36
Introduction
38
General Networking Information
38
IP Addresses
38
IP Address
38
Connecting Transpector MPH
38
Connecting a Single Transpector MPH
51
Single Transpector MPH Direct Connection Installation
51
Installing a Single Transpector MPH on an Existing Local Network
51
Installing Multiple Transpector MPH Sensors
52
Installing Multiple Transpector MPH Directly to a Host Computer
52
Installing Multiple Transpector MPH on an Existing Local Network
52
How the Instrument Works
53
Introduction
53
Overview
53
The Ion Source
54
Choosing the Proper Filament
57
Yttria-Coated Iridium Filaments
57
Tungsten Filaments
57
The Quadrupole Mass Filter
58
Scanning Characteristics
60
The Zero Blast
61
The Ion Detector
62
The Faraday Cup Detector
62
The Electron Multiplier (EM) Detector
63
The Continuous Dynode Electron Multiplier/Faraday Cup Detector
64
Applications Guide
66
How to Interpret the Result
66
Qualitative Interpretation of Mass Spectra
66
Ionization Process
67
Isotope Ratios
68
Electron Energy Effects
70
A Qualitative Interpretation Guide
71
Quantitative Interpretation of Mass Spectra
73
(Calculating Partial Pressures)
73
Additional Information for Interpreting Mass Spectra
79
Ion Source Characteristics
79
Scanning Characteristics
80
Fragmentation Factors
81
Using Transpector Web UI
82
Introduction
82
What Is Transpector Web UI
82
System Requirements
83
Using Transpector Web UI on Computers
83
Using Transpector Web UI on Mobile Devices
83
Connecting to Transpector Web UI
84
Connecting to Transpector Web UI with Default Factory IP Address
84
Connecting to Transpector Web UI with a User-Defined IP Address
86
Navigating Transpector Web UI
86
Status
86
Monitor
88
Leakcheck
88
Diagnostics
89
Tune
90
Help
90
Print
90
Using Transpector Web UI
91
Transpector Web UI and Fabguard
91
Standalone Transpector Web UI Operation
92
Data Acquisition
92
Editable Parameters
92
How to Change Scan Parameters
93
Leak Checking
95
Leak Check Components
96
Using the Leak Check Mode
98
Tune Mode
98
Tune Mode Components
99
Default Tune Mode Parameters
102
Tuning Transpector MPH
103
Changing the Transpector MPH IP Address and Port Number
104
Manually Changing the IP Address
105
Using DHCP to Allow the Network to Assign an IP Address
106
Changing the Port Number of Transpector MPH
106
Changing the Subnet Mask of Transpector MPH
107
Changing the Gateway of Transpector MPH
107
Changing the Sensor ID and Description
107
Transpector Web UI Best Known Methods
108
When to Use Transpector Web UI
108
Vacuum Diagnostics
108
Leak Checking
108
Remote Monitoring
108
Generating Shortcuts for Quick Access
109
Creating Bookmarks
111
Using Wi-Fi
112
Why Use Wi-Fi
112
Troubleshooting
112
Maintenance
113
Introduction
113
Safety Considerations
113
Toxic Material
113
Radiation
113
Electrical Voltages
114
General Instructions for All Repair Procedures
114
Maintenance Procedures
115
Bakeout of Quadrupole
115
Spare Heating Jacket Part Numbers
115
Repair Procedures
116
Tools Required
116
Tools for Replacing the Filament Kit
116
Tools for Replacing the Ion Source
116
Tools for Replacing the Electron Multiplier
116
How to Determine if a Filament Kit Replacement Is Required
117
Filament Kit Replacement
118
Ion Source Removal
121
Electron Multiplier Replacement
123
Calibration
127
Mass Alignment
127
Factory Tuning
127
Selecting Tune Masses
128
Selecting Masses for Tuning with a CPM Test Mixture Calibration Reference
128
Selecting Masses for Tuning with an Argon Standard Calibration Reference
129
Selecting Masses for Tuning with a User-Supplied Test MIX
129
Selecting Masses for Tuning with Process Gases
129
Tuning with Background Gases
130
Diagnosing Problems
131
Introduction
131
Symptom-Cause-Remedy Chart
131
Communication Problems
136
Glossary
138
Transpector MPH Accessories and Spare Parts
145
Introduction
145
MPH Accessories
145
Transpector MPH Spare Parts
146
Preventative Maintenance Parts
146
Replacement Spare Parts
146
Spare Transpector MPH Electronics Boxes
147
Spare Transpector MPH Sensors
147
Specifications
148
Introduction
148
Sensor Length (Vacuum Side)
148
Mass Range
148
Detector Type
148
Resolution
149
Temperature Coefficient
149
Sensitivity
149
Minimum Detectable Partial Pressure
149
Maximum Operating Pressure
150
Maximum Sensor Operating Temperature
150
Maximum Bakeout Temperature
150
Operating Temperature
150
Power Input
150
Ethernet Communication Interface
151
Relay Outputs
151
Inputs
151
Indicators (Green)
151
Introduction
152
Ship Kit
152
Electronics Module
153
Power Supply
153
Sensor
153
Extension Kit
154
Software
155
Heating Jacket System (Optional)
155
Calibration Reference (Optional)
155
Interlock Kit (Optional)
155
Angle Valve (Optional)
156
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Inficon Transpector MPH Specifications
General
Brand
Inficon
Model
Transpector MPH
Category
Measuring Instruments
Language
English
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