Inficon Transpector XPR 3+ - 7.4 Maintenance Procedures; 7.4.1 Bakeout of Quadrupole

7 - 3
Transpector XPR 3+ Operating Manual
7.4 Maintenance Procedures
7.4.1 Bakeout of Quadrupole
If the symptoms in section 8.2, Symptom-Cause-Remedy Chart, on page 8-1,
suggest that the sensor is contaminated, try first to restore normal performance by
baking the sensor under a high vacuum
—at least 1 x 10
-5
Torr (1.333 x 10
-5
mbar)
[1.333 x 10
-3
Pa]—for several hours, preferably overnight. Table 7-1 represents
the maximum bakeout temperatures.
If baking the sensor doesn’t increase the sensor performance, it may be necessary
to perform the tasks described in section 7.5.3, Filament Kit Replacement, on page
7-5.
If the procedures explained above do not solve the problem, contact INFICON.
Refer to section 1.3, How To Contact Customer Support, on page 1-2.
CAUTION
When heating the sensor above 150 C, the electronics
module and the signal contact must be removed from the
sensor.
7.4.2 Spare Heating Jacket Part Numbers
INFICON offers several heating jackets to help in baking a sensor. These heating
jackets operate at a maximum temperature of 150
C.
Heating jacket part numbers are shown in Table 11-1 on page 11-1.
Table 7-1 Maximum bakeout temperatures
While
Operating
With
Electronics
Removed
Transpector XPR 3+
Electron Multiplier
Faraday Cup
Combination
EM Mode
FC Mode
150
C
150
C
200
C
200
C