Inficon Transpector XPR 3+ User Manual

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Transpector XPR 3+ Operating Manual
6.6 General Description of Transpector XPR 3+ Low Pressure EM
Option Gas Analysis System
Transpector XPR 3+ Low Pressure EM Gas Analysis System is comprised of:
Sensor
The sensor, which functions only in a vacuum environment with pressures below
1x10
-2
Torr (2x10
-2
Torr with Pirani Interlock option).
The sensor itself is comprised of three parts:
 ion source (ionizer)
 quadrupole mass filter
 ion detector
Transpector XPR 3+ Low Pressure EM detector includes a continuous dynode
electron multiplier (CDEM) that can operate at a total pressure up to 1x10
-4
Torr.
The CDEM voltage range is 775 to 1,225 volts.
The sensor is mounted on an electrical feed-through flange, which is bolted to the
vacuum space where the gas analysis measurements are made.
Electronics Module
The electronics module controls the sensor. The electronics module and sensor
are matched, sold, and operated as a set. The electronics module attaches to and
is supported by the sensor.
Pirani Interlock (Optional)
The optional Pirani Interlock controls sensor emission.
Software
The software controls the electronics module.

Inficon Transpector XPR 3+ Specifications

General

Brand	Inficon
Model	Transpector XPR 3+
Category	Measuring Instruments
Language	English