Inficon Transpector XPR 3+ User Manual

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Transpector XPR 3+ Operating Manual
Figure 7-5 Top view of the Transpector XPR 3+ sensor
3 Measure the resistance of each of the pins with respect to ground (refer to pin
A in Figure 7-2). These measurements should be above 30M.
4 Measure the resistance of each of the pins with respect to each other. All of
these measurements should also be above 30M.
 If any of the measurements in steps 3 and 4 are less than 30M
 the ion source
is contaminated and requires cleaning or replacement before the new filament
is installed. Contact the nearest INFICON Service Center for assistance with
returning the unit to the factory for repair. Refer to section 1.3, How To Contact
Customer Support, on page 1-2.
If the resistance measurements in steps 3 and 4 above are greater than
30 M
 refer to section 7.5.3, Filament Kit Replacement.
Filament
Assembly
Screws
AnodeRepeller

Inficon Transpector XPR 3+ Specifications

General

Brand	Inficon
Model	Transpector XPR 3+
Category	Measuring Instruments
Language	English