Inficon Transpector XPR 3+

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Declaration Of Conformity

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Table of Contents4
Getting Started9
Introduction9
Using this Manual9
Note and Hint Paragraphs9
Warning and Caution Paragraphs10
How to Contact Customer Support10
Returning Transpector XPR 3+ to INFICON11
Quick Start11
Purpose of Transpector XPR 3+ Gas Analysis System11
General Description of Transpector XPR12
Gas Analysis System12
Specifications for Transpector XPR 3+ Gas Analysis System12
Supplied Items12
Physical Requirements13
Physical Dimensions13
Weight14
Mounting Requirements14
Ventilation Requirements14
Maintenance Access14
Electrical Power Requirements14
Required Supply Voltage14
Current Rating14
Electrical Connection14
Overvoltage Category15
Required Vacuum15
Environmental Requirements15
Use15
Altitude Range15
Pollution Degree15
Operating Temperature16
Humidity16
Computer System Requirements16
Software Installation16
Hardware Installation16
Avoiding Process Metal Deposition17
Installing the Isolation Valve19
Mounting the Pirani Interlock Weldment Assembly25
Mounting the Pirani Gauge26
Sensor Installation27
Electronics Module Installation30
Initial Start-Up Procedure31
Installing Ethernet Communications31
Connecting the 24 V(DC) Power Supply32
Connecting the Pirani Interlock Cable32
Attaching Heating Jackets33
Input/Output (I/O)33
Two Digital Inputs34
One Status Relay Output34
One Analog Input36
Connecting Transpector XPR 337
Introduction37
General Networking Information37
IP Addresses37
Subnetworking39
Transpector XPR 3+ IP Address39
Changing Transpector XPR 3+ IP Address39
Connecting Transpector XPR 346
Connecting a Single Transpector XPR 347
Installing Multiple Transpector XPR 3+ Sensors47
How the Instrument Works49
Introduction49
Overview49
Patents49
Sensor51
The Ion Source53
The Quadrupole Mass Filter54
The Ion Detector56
Scanning Characteristics58
The Zero Blast58
High Pressure Effects59
Applications Guide61
How to Interpret the Result61
Qualitative Interpretation of Mass Spectra61
Quantitative Interpretation of Mass Spectra69
(Calculating Partial Pressures)69
Additional Information for Interpreting Mass Spectra75
Transpector XPR 3+ Operation and Best Known Methods79
Introduction79
Precautions for Operation80
Pirani Interlock Protection80
Fabguard Control80
Transpector XPR 3+ Configuration- I/O Tab80
Using Transpector XPR 384
Leak Detection84
Recipe Generation85
Mass Scale Tuning85
Transpector XPR 3+ Filament85
High Pressure Electron Multiplier85
Transpector XPR 3+ Low Pressure EM87
Introduction87
Transpector XPR 3+ Filament Caution87
Electron Multiplier Caution87
Quick Start88
Purpose of the Transpector XPR 3+ Low Pressure EM Option Gas Analysis System88
General Description of Transpector XPR 3+ Low Pressure EM Option Gas Analysis System89
Specifications for Transpector XPR 3+ Low Pressure EM Option Gas Analysis System90
Supplied Items91
XPR 3+ Low Pressure EM Installation91
XPR 3+ Low Pressure EM Operation91
Introduction92
Safety Considerations92
Toxic Material92
Radiation92
Electrical Voltages93
General Instructions for All Repair Procedures93
Maintenance Procedures94
Bakeout of Quadrupole94
Spare Heating Jacket Part Numbers94
Repair Procedures95
Tools Required95
How to Determine if a Filament Kit Replacement Is Required96
Filament Kit Replacement96
How to Determine the Condition of the Ion Source98
Mass Calibration100
Mass Alignment100
Pirani Interlock Adjustment Procedures101
INFICON PSG500 Adjustment Instructions101
Diagnosing Problems104
Introduction104
Symptom-Cause-Remedy Chart104
Communication Problems109
Bibliography110
Glossary111
Transpector XPR 3+ Accessories and Spare Parts118
Introduction118
Transpector XPR 3+ Accessories118
Transpector XPR 3+ Spare Parts119
Preventative Maintenance Parts119
Replacement Spare Parts119
Specifications121
Introduction121
Mass Range121
Detector Type121
Resolution121
Temperature Coefficient121
Sensitivity122
Maximum Operating Pressure122
Maximum Sensor Operating Temperature122
Maximum Bakeout Temperature123
Operating Temperature123
Power Input123
Ethernet Communication Interface123
Relay Outputs123
Inputs123
Indicators (Green)123
Supplied Items124
Introduction124
Ship Kit124
Electronics Module125
Power Supply125
Sensor126
Software126
Heating Jacket System (Optional)126
Interlock Kit (Optional)126
Angle Valve (Optional)127

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