EasyManua.ls Logo

Inficon Gemini MPG500

Inficon Gemini MPG500
64 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
tina83e1-d (2018-12) 41
If the pressure value 1000 mbar is output at the
measurement value output, the adjustment has been
successful. Otherwise, repeat the adjustment proce-
dure.
Evacuate the vacuum system to p < 10
-5
mbar and wait at
least 2 minutes.
Press the <ADJ> button with a pin and the HV adjustment
is carried out (duration 5 s).
If the pressure value 1×10
-5
mbar is output at the
measurement value output, the adjustment has been
successful. Otherwise, repeat the adjustment proce-
dure.
6.2 Cleaning the Gauge / Replacing Parts
In case of severe contamination or defective (e.g. pirani
filament rupture (MPG5xx)), replace the complete
measuring chamber (Spare Parts 57).
DANGER
Contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant re-
gulations and take the necessary precautions when
handling contaminated parts.

Related product manuals