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Gemini MPG500
Inficon Gemini MPG500 User Manual
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LI
–
9496 Balzer
s
Liechte
nstein
Tel
+423 / 388
3111
Fax
+423
/ 388
3700
Original: German
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www.inficon.com
63
Table of Contents
Default Chapter
2
Product Identification
2
Validity
3
Intended Use
4
Functional Principle
4
Scope of Delivery
5
Table of Contents
6
1 Safety
8
Symbols Used
8
Personnel Qualifications
8
General Safety Instructions
9
Liability and Warranty
9
2 Technical Data
10
Measuring Signal Vs. Pressure
16
Gas Type Dependence Mag5Xx
19
Gas Type Dependence Mpg5Xx
21
3 Installation
24
Vacuum Connection
24
Power Connection
28
FCC 68, 8-Pin Connector
29
D-Sub, 9-Pin Connector
30
4 Operation
31
Status Indication Mag50X
31
Status Indication Mpg50X
32
Put Mag5Xx into Operation
33
Put Mpg5Xx into Operation
33
Gas Type Dependence
34
Ignition Delay
35
Contamination
35
5 Deinstallation
37
6 Maintenance, Repair
39
Adjusting the Gauge
39
Cleaning the Gauge / Replacing Parts
41
Troubleshooting (Measuring Chamber)
42
Replacing Ionization Chamber and Ignition Aid
44
Replacing Measuring Chamber
50
Troubleshooting
52
7 Returning the Product
55
8 Disposal
56
9 Options
57
10 Accessories
57
11 Spare Parts
57
Ignition Aid for Mag5Xx and Mpg5Xx
58
Ionization Chamber for Mag5Xx and Mpg5Xx
58
Measuring Chamber Cpl. (Spare Sensor)
58
11.3.1 Measuring Chamber Cpl. for Mag5X0
58
11.3.2 Measuring Chamber Cpl. for Mag5X4
59
11.3.3 Measuring Chamber Cpl. for Mpg5X0
59
11.3.4 Measuring Chamber Cpl. for Mpg5X4
60
Literature
61
ETL Certification
61
EU Declaration of Conformity
62
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Inficon Gemini MPG500 Specifications
General
Brand
Inficon
Model
Gemini MPG500
Category
Measuring Instruments
Language
English
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