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General| Type | Scanning Electron Microscope (SEM) |
|---|---|
| Accelerating Voltage | 0.5 to 30 kV |
| Magnification | 5x to 300, 000x |
| Detectors | Secondary Electron Detector (SED), Backscattered Electron Detector (BSED) |
| Electron Source | Tungsten (W) filament |
| Stage | Motorized stage with X, Y, Z, tilt, and rotation |
| Vacuum Mode | High vacuum, low vacuum |
| Vacuum System | Turbo molecular pump |
| Image Storage | Digital image storage |
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