JEOL JSM-6301F - User Manual

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SEM (JEOL, JSM-6301) Operation manual 2014 06 11
The turning on the SEM
1. Turn on the scanning image observation instrument with the OPE POWER switch at the rear of
the instrument.
2. Rotate the POWER key switch to the START position, and release the hand from the key.
(The key rotates to the ON position automatically.)
3. The ACCEL VOLTAGE READY lamp turns on at once. (The user should confirm the lamp
turning on.)
 *Please contact the staff, if the lamp does not turn on.
The sample exchange (The insert of the sample)
1. Place the sample in the sample holder (cylinder), and align the sample upper face and the upper
side of the cylinder, using the height adjusting screw (tighten by the screw).
2. Screw the sample exchange rod to the sample holder, and tighten the rod.
3. Put the sample stage to the position where the sample is possible to exchange.
 Confirm the position for the sample exchange: X:25.0 Y:35.0 TILT:000  WD:39
4. Pull the exchange rod, and then fix the sample holder to the stopper.
5. Fit the exchange rod to the sample exchange chamber.
While supporting the exchange rod by hand, press the vacuum operation button.
6. When the lamp is turned off, rotate anticlockwise immediately the knob of the gate valve of the
sample exchange chamber, and then pull out the knob fully.
7. While looking the inner part of the chamber, push in the rod slowly, and fix the sample holder
onto the stage.
8. Rotate anticlockwise the rod, and remove the rod from the sample holder.
Pull out the sample rod from the chamber fully.
9. Push in the knob of the gate valve of the sample exchange chamber, and rotate clockwise the
knob. This operation makes a clicking sound.
10. While supporting the exchange rod by hand, remove the rod by pressing the vacuum operation
button.
The observation with the SEM
 1. Press the F2 function key on the keyboard.
 2. Confirm the accelerating voltage being 0.0 kV (see the second line from the top on the right
side screen).
Turn on the ACCEL VOLTAGE switch. The extracting voltage is applied, and the emission

Summary

Turning on the SEM

Sample Exchange: Inserting a Sample

SEM Observation Setup

SEM Observation and Photography

Adjusting Accelerating Voltage

Procedure for setting and adjusting the accelerating voltage for SEM observation.

Photography Method using Film

Instructions for capturing images using photographic film in the SEM.

Capturing Images to MO Disk

Steps for saving sample images to an MO disk, including focus and brightness adjustments.

SEM Image Saving and Axis Adjustment

Saving Image Data to MO Disk

Final steps for saving captured image data to an MO disk, including file naming.

Adjusting Objective Lens Diaphragm

Procedure to adjust the objective lens diaphragm for optimal image quality.

Correcting Image Astigmatism

Steps to correct image blur caused by astigmatism using focus and stigmator controls.

Adjusting Beam Axis (SEM1 Mode)

Procedure for aligning the electron beam axis in SEM1 mode for stable imaging.

SEM Axis Adjustment (Alternative Methods)

Adjusting Beam Axis (Alternative Method)

Alternative procedure for adjusting the electron beam axis to maximize image brightness.

Correcting CL Astigmatism

Procedure for correcting astigmatism specific to the CL (Cathodoluminescence) mode.

Sample Exchange: Removing a Sample

Completing SEM Operation

JEOL JSM-6301F Specifications

General

Type	Scanning Electron Microscope (SEM)
Electron Source	Field Emission Gun (FEG)
Accelerating Voltage	0.5 to 30 kV
Stage	Motorized stage
Stage Movement X	100 mm
Stage Movement Y	100 mm
Stage Movement R	360 degrees
Manufacturer	JEOL
Model	JSM-6301F
Magnification	x20 to x300, 000
Detectors	Secondary electron detector, Backscattered electron detector
Vacuum System	Turbo molecular pump
Image Storage	Digital