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General| Type | Scanning Electron Microscope (SEM) |
|---|---|
| Electron Source | Tungsten filament |
| Accelerating Voltage | 0.5 to 30 kV |
| Resolution | 3.0 nm |
| X-ray Microanalysis (EDS) | Optional |
| Vacuum System | Turbomolecular pump with rotary pump |
| Detectors | Secondary Electron Detector, Backscattered Electron Detector |
| Magnification | x5 to x300, 000 |
| Stage | 5-axis motorized stage |
| Specimen Stage | X: 80 mm, Y: 40 mm, Z: 5 to 50 mm, Rotation: 360°, Tilt: -10° to +50° |
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