Contents
Page
1 Description . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 System overview . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Compatibility with pumped media . . . . . . . . . . 4
1.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . 4
1.4 Function and design of the MAG.DRIVE . . . . 5
1.5 Standard specification . . . . . . . . . . . . . . . . . . 6
1.6 Technical data . . . . . . . . . . . . . . . . . . . . . . . . 6
1.7 Ordering information . . . . . . . . . . . . . . . . . . . 8
2 Installation . . . . . . . . . . . . . . . . . . . . . . . . 13
2.1 General safety information . . . . . . . . . . . . . . 13
2.2 Unpacking - storing - transportation . . . . . . . 13
2.3 Operating environment . . . . . . . . . . . . . . . . 14
2.4 Connecting the MAG
to the vacuum chamber . . . . . . . . . . . . . . . . 14
2.5 Connecting the backing pump . . . . . . . . . . . 19
2.6 Connecting the cooling water . . . . . . . . . . . . 20
2.7 Connecting the purge gas . . . . . . . . . . . . . . 22
2.8 Installing the MAG.DRIVE . . . . . . . . . . . . . . 24
2.8.1 Power supply connection X10 . . . . . . . . . . . 25
2.8.2 Pump connection . . . . . . . . . . . . . . . . . . . . . 26
2.8.3 Control plug X14 . . . . . . . . . . . . . . . . . . . . . 27
2.8.4 Interface connector . . . . . . . . . . . . . . . . . . . 31
3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 32
3.1 General operation rules . . . . . . . . . . . . . . . . 32
3.2 Operation with the START and STOP keys . 34
3.3 Remote control . . . . . . . . . . . . . . . . . . . . . . 35
4 Plug-in Control . . . . . . . . . . . . . . . . . . . . . 36
4.1 Operation with plug-in control . . . . . . . . . . . 36
4.2 Operating statuses . . . . . . . . . . . . . . . . . . . 38
4.3 Operating menu . . . . . . . . . . . . . . . . . . . . . . 40
4.3.1 Basic menu . . . . . . . . . . . . . . . . . . . . . . . . . 40
4.3.2 Settings converter . . . . . . . . . . . . . . . . . . . . 41
4.3.3 Settings pump . . . . . . . . . . . . . . . . . . . . . . . 42
4.3.4 Settings temperature management system . 42
4.3.6 Total view of the menu . . . . . . . . . . . . . . . . . 43
4.4 Temperature management system . . . . . . . . 44
5 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 46
5.1 Removing the pump from the system . . . . . . 46
5.2 Service at Leybold’s . . . . . . . . . . . . . . . . . . 48
6 Troubleshooting . . . . . . . . . . . . . . . . . . . . 50
6.1 Warning messages . . . . . . . . . . . . . . . . . . . 50
6.2 Failure messages . . . . . . . . . . . . . . . . . . . . 52
6.3 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . 57
Certifications . . . . . . . . . . . . . . . . . . . . . . . . 58
Forms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Figures
The references to diagrams, e. g. (1/2) consist of the Fig.
No. and the Item No. in that order.
We reserve the right to alter the design or any data given
in these Operating Instructions. The illustrations are not
binding.
The Operating Instructions are included with the pump
and the converter. If they have different numbers, the
version delivered with the pump describes the pump
correctly and the version delivered with the converter
describes the converter correctly.
Concerning the converter description, this GA
05.139/1.02 is nearly identical to GA 05.135/3.02 for
the standard MAG versions.
See also the last page.
2
GA 05.139/1.02 - 06/99