Description
3
GA 05.139/1.02 - 06/99
1 Description
1.1 System overview
The Leybold MAG pumping system consists of:
• The MAG W 2010 CHT turbopump
The MAG are turbomolecular pumps utilizing magne-
tic bearings.They are designed to evacuate vacuum
chambers down to pressure values in the high-vacu-
um range and to pump high gas throughputs.
The pump design allows high temperatures (HT) at
the connection flanges without reduction of the maxi-
mum gas throughput.
• The MAG.DRIVE 2000 frequency converter
The electronic converter converts the single-phase
line supply voltage into a three-phase DC voltage to
drive the pump motor. It also evaluates measured sig-
nals and controls
- the pump functions
- the temperature management system (TMS) and
- the active magnetic bearing system
The MAG.DRIVE 2000 can be operated with the
START and STOP keys, via a plug-in control, or via a
network interface.
• A cable set consisting of:
- BEARING cable
- DRIVE/TMS cable
Fig. 1 MAG W 2010 CHT
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